Free PDF Micromirror Technology for Maskless Lithography: Dynamics, Control and Fabrication

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Micromirror Technology for Maskless Lithography: Dynamics, Control and Fabrication

Free PDF Micromirror Technology for Maskless Lithography: Dynamics, Control and Fabrication

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About the Author

Yijian Chen received his Ph.D. in EECS from University of California, Berkeley. He is an Associate Professor of Electronic and Computer Engineering in Peking University. He was the recipient of Ross Tucker AIME Electronics Materials Award and SRC Inventor Recognition Award. He has published extensively and holds several US patents.

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Product details

Paperback: 156 pages

Publisher: Scholars' Press (August 21, 2013)

Language: English

ISBN-10: 3639513657

ISBN-13: 978-3639513653

Product Dimensions:

5.9 x 0.4 x 8.7 inches

Shipping Weight: 9.9 ounces (View shipping rates and policies)

Average Customer Review:

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Amazon Best Sellers Rank:

#10,757,880 in Books (See Top 100 in Books)

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Micromirror Technology for Maskless Lithography: Dynamics, Control and Fabrication PDF

Micromirror Technology for Maskless Lithography: Dynamics, Control and Fabrication PDF

Micromirror Technology for Maskless Lithography: Dynamics, Control and Fabrication PDF

Micromirror Technology for Maskless Lithography: Dynamics, Control and Fabrication PDF